- Title
- A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor
- Creator
- Ji, Lujun; Zhu, Yong; Moheimani, S. O. Reza; Yuce, Mehmet Rasit
- Relation
- 9th IEEE SENSORS Conference, 2010 (SENSORS 2010). Proceedings of the Ninth IEEE Sensors Conference 2010, SENSORS 2010 (Kona, HI 1-4 November, 2010) p. 1464-1467
- Publisher Link
- http://dx.doi.org/10.1109/ICSENS.2010.5690373
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- conference paper
- Date
- 2010
- Description
- This paper presents the design, fabrication and characterization of a micromachined two degrees-of-freedom (2DOF) nanopositioner. The proposed micro-electro-mechanical system (MEMS) stage, consisting of comb-drive actuators and on-chip capacitive displacement sensors in both X and Y directions, can simultaneously actuate the microstage and sense the corresponding displacements. A commercial capacitive readout IC (MS3110) is used for the open-loop capacitive sensing. The first resonance frequency of the stage is measured to be 4.24 kHz. The positioner has a dynamic range from −6.27 µm to +6.64 µm at an actuation voltage of 100 V.
- Subject
- nanopositioners; MEMS; capacitive sensors; frequency measurement; microelectromechanical systems
- Identifier
- http://hdl.handle.net/1959.13/933327
- Identifier
- uon:11600
- Identifier
- ISBN:9781424481705
- Identifier
- ISSN:1930-0395
- Rights
- Copyright © 2010 IEEE. Reprinted from the Proceedings of the Proceedings of the Ninth IEEE Sensors Conference 2010, SENSORS 2010. This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Newcastle's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it.
- Language
- eng
- Full Text
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